Friction force microscopy of tribochemistry and interfacial ageing for the SiO_x/Si/Au system

• Christiane Petzold,
• Marcus Koch and
• Roland Bennewitz

Beilstein J. Nanotechnol. 2018, 9, 1647–1658, doi:10.3762/bjnano.9.157

• ; tribochemistry; wear; Introduction Contact ageing, the strengthening of contacts after formation, is an important phenomenon in tribology, with impact ranging from the nano-scale (NEMS and MEMS) [1][2] to the macro-scale (sliding of rock in earthquakes) [3][4]. Different microscopic mechanisms for contact

Fabrication of high-resolution nanostructures of complex geometry by the single-spot nanolithography method

• Alexander Samardak,
• Margarita Anisimova,
• Aleksei Samardak and
• Alexey Ognev

Beilstein J. Nanotechnol. 2015, 6, 976–986, doi:10.3762/bjnano.6.101

• fabrication rate as compared to conventional lithography on positive-tone resist. This technique can be potentially employed in the electronics industry for the production of nanoprinted lithography molds, etching masks, nanoelectronics, nanophotonics, NEMS and MEMS devices. Keywords: electron-beam

The atomic force microscope as a mechano–electrochemical pen

• Christian Obermair,
• Andreas Wagner and
• Thomas Schimmel

Beilstein J. Nanotechnol. 2011, 2, 659–664, doi:10.3762/bjnano.2.70

• microscopy; deposition; electrochemistry; nanoelectronics; nanofabrication; nanolithography; nanotechnology; NEMS and MEMS; scanning probe lithography; Introduction The controlled, patterned, electrochemical deposition of metals at predefined positions on the nanometer scale is of great interest for